Reducing impact of cross-talk between modulators that drive a multi-channel aom

ABSTRACT

The disclosed technology teaches a method of reducing the impact of cross-talk between transducers that drive an acousto-optic modulator. The method includes operating the transducers, which are mechanically coupled to an acousto-optic modulator medium, with different frequencies applied to adjoining transducers and producing a time-varying phase relationship between carriers on spatially adjoining modulation channels emanating from the adjoining transducers, with a frequency separation between carriers on the adjoining channels of 400 KHz to 20 MHz. The disclosed technology also includes operating 5 to 32 modulators, which are mechanically coupled to the acousto-optic modulator crystal, and varying the different frequencies applied to the modulators in a sawtooth pattern, varying the different frequencies over a range and then repeating variation over the range. Also included is varying the frequencies applied to the modulators in a rising or falling pattern applied progressively to the spatially adjoining transducers.

FIELD OF THE TECHNOLOGY DISCLOSED

The disclosed invention relates to pattern generation, direct-writelithography and to optical writing of patterns on a photosensitivesurface in general. In particular it relates to the patterning ofphotomasks, wafers, printed circuit boards (PCBs), fine-pitchinterconnection substrates, flexible substrates with or without activecomponents (transistors) and/or of panels for displays, photovoltaicsand illumination. Other patterns with line widths from 0.03 to 10microns may also use the technology disclosed. In particular thetechnology relates to high-precision pattern generators and directwriters using acousto-optic modulation.

BACKGROUND

The subject matter discussed in this section should not be assumed to beprior art merely as a result of its mention in this section. Similarly,a problem mentioned in this section or associated with the subjectmatter provided as background should not be assumed to have beenpreviously recognized in the prior art. The subject matter in thissection merely represents different approaches, which in and ofthemselves may correspond to implementations of the claimed technologyalso.

Streaming video from smartphones and tablets require high-resolutiondisplays, which are only possible with the use of advanced manufacturingtools, including laser mask writers for photomask production. Displaymask writers are the de facto used in the industry for production of allhigh-resolution thin film transistor (TFT), liquid crystal display (LCD)and active-matrix organic light-emitting diode (AMOLED) displaysworldwide.

Pattern generators are used to write microscopic images onto photomaskswhich then function as templates for mass production of displays,integrated circuits and electronic packaging. The manufacturing process,called microlithography, is similar to the way in which photographs arereproduced with the help of a negative. A microlithographic laser writeruses a laser beam to pattern a latent image in a photosensitive surface,such as resist on a mask, which is used, in turn, to pattern wafers orlarge area displays. In the photomask manufacturing industry, stringentrequirements are placed on critical dimensions (CD).

Acousto-optic modulation is commonly used in laser scanners, providing areasonable compromise between cost, speed and efficiency. The laserscanner using an acousto-optic modulator (AOM) may have a single beam ormultiple beams and after the modulation of the beam it may be scanned byelectro-optic or mechanical means. Prior art exists in the form ofpolygon scanners, and acousto-optic, all of them employing acousto-opticmultibeam modulation.

The pattern line width measurement is a critical dimension (CD) alsoreferred to as edge roughness, which varies as a result of variations inthe signal for the laser dose, which is controlled using acousto-opticmodulation. An opportunity arises to improve the stability of linewidths, and thereby the critical dimensions for pattern generation,direct-write lithography and for optical writing of patterns on aphotosensitive surface.

SUMMARY OF THE INVENTION

As a first aspect of the invention, there is provided a method ofreducing impact of cross-talk between transducers that drive anacousto-optic modulator, abbreviated AOM, including:

operating the transducers, which are coupled to an acousto-optic medium,with different frequencies applied to adjoining transducers andproducing a time varying phase relationship between carriers onspatially adjoining modulation channels emanating from the adjoiningtransducers.

The method may be for reducing impact of cross-talk between transducersthat drive an AOM in a microlithographic laser writer.

The AOM may comprise a plurality of transducers. The transducers may beconfigured for creating an acoustic wave in the acousto-optic medium.The transducers may for example be piezoelectric transducers.

In embodiments, the method is further comprising operating thetransducers with the frequencies having differences between pairs ofadjoining transducers of at least 100 KHz and a maximum difference of 20MHz. As an example, the frequency differences between pairs of adjoiningtransducers may be in a range of 400 KHz to 10 MHz. As a furtherexample, the frequency differences between pairs of adjoiningtransducers may be less than 5 MHz, such as less than 2 MHz, such asless than 1 MHz, such as less than 500 kHz. As an example, the frequencydifferences between pairs of adjoining transducers may be between 400kHz and 1 MHz.

In embodiments, the method comprises operating between 5 and 32 of thetransducers to produce 5 to 32 modulation channels in the acousto-opticmedium.

In embodiments, the different frequencies between the spatiallyadjoining modulation channels are arranged in a sawtooth pattern.

In embodiments, the different frequencies between the spatiallyadjoining modulation channels are arranged in a rising or fallingpattern applied progressively to the adjoining transducers.

In embodiments, the different frequencies vary between pairs ofadjoining transducers by an amount in a range of plus or minus threepercent from an average frequency applied to the transducers.

As a second aspect of the invention, there is provided an acousto-opticmodulator, abbreviated AOM, with reduced impact of cross-talk betweentransducers that are part of the AOM, including:

-   -   an acousto-optic medium;    -   a plurality of transducers physically coupled to the        acousto-optic medium, spaced apart to drive separate modulation        channels within the acousto-optic medium; and    -   a signal synthesizer coupled to the transducers that drives the        transducers at different frequencies to produce a time varying        phase relationship between spatially adjoining modulation        channels.

The AOM may further comprise acoustic absorbers for preventingreflection of waves generated by the transducers back to through theacousto-optic medium.

The acousto-optic medium may for example be silica, quartz or glass.

The AOM may have a beam entrance surface and a beam exit surface. Eachtransducer may be adapted to modulate a laser beam within a specificmodulation zone that traverses the laser beam path between the beamentrance surface and the beam exit surface.

The signal synthesizer may be adapted to generate a radiofrequencysignal (RF signal), and the plurality of transducers may be adapted toconvert the RF signals from the signal synthesizers into acoustic wavesthat transverse through the AOM.

In embodiments of the second aspect, the AOM is further includingoperating the transducers with the frequencies having differencesbetween pairs of adjoining transducers of at least 100 KHz and a maximumdifference of 20 MHz. Thus, the signal synthesizer may be configured tooperate the transducers with the frequencies having differences betweenpairs of adjoining transducers of at least 100 KHz and a maximumdifference of 20 MHz.

In embodiments of the second aspect, frequency differences between pairsof adjoining transducers are in a range of 400 KHz to 10 MHz. The signalsynthesizer may be configured to operate the transducers with frequencydifferences between pairs of adjoining transducers that are in a rangeof 400 KHz to 10 MHz.

The phase relationship between spatially adjoining modulation channelsmay be between ⅔π and 4/3π.

In embodiments of the second aspect, the AOM includes operating between5 and 32 of the transducers to produce 5 to 32 modulation channels inthe acousto-optic medium. The signal synthesizer may be configured tooperate between 5 and 32 of the transducers to produce 5 to 32modulation channels in the acousto-optic medium.

In embodiments of the second aspect, different frequencies between thespatially adjoining modulation channels are arranged in a sawtoothpattern.

In embodiments of the second aspect, the different frequencies betweenthe spatially adjoining modulation channels are arranged in a rising orfalling pattern applied progressively to the adjoining transducers.

In embodiments of the second aspect, different frequencies vary betweenpairs of adjoining transducers in an amount in a range of plus or minusfive percent from an average frequency applied to the transducers.

As third aspect of the invention, there is provided a microlithographiclaser writer comprising an AOM according to the second aspect above.

As third aspect of the invention, there is provided a microlithographiclaser writer configured to perform the method according to the firstaspect above.

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings, like reference characters generally refer to like partsthroughout the different views. Also, the drawings are not necessarilyto scale, with an emphasis instead generally being placed uponillustrating the principles of the technology disclosed. In thefollowing description, various implementations of the technologydisclosed are described with reference to the following drawings.

FIG. 1A shows a multibeam laser scanner, as known in prior art.

FIG. 1B shows the radio frequency (RF) driver of FIG. 1A in detail, asknown in prior art.

FIG. 2A shows an example spatial-dimension graph for a multi-channel AOMfor an array of fifteen channels of transducers integrated with a singleacousto-optic crystal, operated at a carrier frequency of 220 MHz.

FIG. 2B shows a 3-dimensional pattern for sound waves leaking fromadjacent AOM channels.

FIG. 3A shows a graph of measured line width critical dimension (CD) perunit time for three different patterning runs represented using threedifferent colors.

FIG. 3B shows a graph of measured line width critical dimension (CD) perunit time results for a second test pattern in which the set oftransducer beams were turned on at the same time.

FIG. 4 shows spread carrier frequency approach results, for two tests inwhich 15 transducer channels, each fed by independent electronics, wereassigned unique carrier frequencies. In the first test, only one of theexposure beams was turned on at any given moment. For the second test,all of the exposure beams were turned on at the same time.

FIG. 5 shows spread carrier frequency approach results for the measuredcritical dimension for a highlighted segment with all of the transducersturned on at the same time.

FIG. 6 shows a simulation of interference from neighboring transducersthat affects a center transducer.

FIG. 7 displays a simulation of average energy disturbance that will beimprinted in the energy distribution over the laser beam, from twoneighboring channel signals.

FIG. 8 displays a simulation of the average energy disturbance that willbe imprinted in the energy distribution over the laser beam for threedifferent phase relationships.

FIG. 9 shows an example sawtooth distribution of channel frequencies inan AOM with 15 transducer channels.

FIG. 10 shows an example step distribution of channel frequencies in anAOM with 15 transducer channels.

FIG. 11 depicts a block diagram of an exemplary system for generatingmodulated RF signals for driving AOM channels, according to oneimplementation of the technology disclosed.

DETAILED DESCRIPTION

The following detailed description is made with reference to thefigures. Sample implementations are described to illustrate thetechnology disclosed, not to limit its scope, which is defined by theclaims. Those of ordinary skill in the art will recognize a variety ofequivalent variations on the description that follows.

A multibeam laser scanner, as known in prior art, is shown in FIG. 1A.The scanner of FIG. 1A could for example be a microlithographic laserwriter for writing a pattern on a photomask, or for direct writing of apattern on a substrate such as a printed circuit board. A laser 100emits a beam 113 which is divided into multiple beams 116 by abeam-splitter 114. Each beam is modulated by a multibeam acousto-opticmodulator (AOM) 112 and deflected by a deflector 110, (could also be apolygon, mirror galvanometer, etc.) so that it scans 108 over thesurface of the workpiece. The optics is symbolically shown as a singlelens 116. The multibeam acousto-optic modulator 112 accepts a modulatedRF signal 130 for each beam which is generated in the RF driver 128which modulates the video 126 on an RF carrier. The RF is typicallyamplitude modulated with the carrier. The input pattern is stored inmemory 120 and converted by a rasterizer 124 to the video used by the RFdriver.

FIG. 1B shows the RF driver in more detail. The input is a digitalsignal 126 which contains gray values for each pixel. The gray valuesare converted to an analog voltage 156 by the DAC 150. The analogvoltage, typically ranging from 0 to 1 volt, modulates the carrier 160from the local oscillator to produce a low-level modulated RF 158 whichis then amplified in an RF amplifier to a power level suitable for theacousto-optic modulator, often 1-5 watts per channel.

An acousto-optic modulator (AOM) uses sound waves within a crystal tocreate a diffraction grating. As the power of the applied RF signal isvaried, the amount of diffracted light varies proportionally.Acousto-optic multi-channel modulators allow multiple beams to bemodulated independently by integrating an array of transducers with asingle acousto-optic crystal. FIG. 2A shows an example spatial dimensiongraph for a multi-channel AOM with an array of fifteen channels oftransducers integrated with a single acousto-optic crystal, operated ata carrier frequency of 220 MHz 242. A multi-channel AOM operates on thesame principles as a typical AOM, and is fabricated using an array ofelectrodes on the transducer substrate so that a parallel array of beamscan be simultaneously controlled. The AOM is typically operated with thesame carrier frequency on all channels. A different acoustic wavediffracts each input beam independently to modulate its intensity. Asthe number of channels incorporated into a single device increases, sodoes the crosstalk between the various modulation channels.

As used herein, “crosstalk” may refer to acoustic crosstalk and/orelectric crosstalk. The electric crosstalk may be capacitive(electrostatic) and/or inductive (electromagnetic).

Under conditions of acoustic crosstalk, sound waves leaking fromadjacent AOM channels will interact and create a 3-dimensional patternsuch as the one shown in FIG. 2B, within the AOM-crystal, consisting ofvolumes with constructive and destructive interference. This pattern isstatic in time and will imprint an amplitude distortion on the laserbeams being modulated by the AOM. This in turn has a negative impact onthe line-width control of the exposed pattern. The overall effect on thetotal transmitted optical energy is small, typically less than 1%,confirmed in previous tests. The crosstalk modulates the shape of theGaussian laser beam, giving relatively large impacts on the measuredline width of exposed pattern structures. The disclosed technologyreduces the impact of cross-talk between transducers that drive amulti-channel AOM.

Experimental results that led to the disclosed technology are describednext. Unexpected CD variation was encountered that needed to bediagnosed. The test patterns written to investigate this problem showeda periodic variation in CD accuracy across beams that varied betweenpatterning runs. The periodicity led to investigation of AOM performanceand discovery of a problem resulting from cross-talk between neighboringtransducers driving modulation channels of the AOM. Careful study andsimulation led to an understanding of coherence effects within the AOMcrystal that were impacting CD accuracy and to the disclosed approach toaddressing the coherence effects that were discovered.

Signal amplitudes for individual beams in the multibeam scan arecalculated to give the same exposure dose, and should result in the sameline width, written via the different beams. With control over theexposure dose, it is expected that the scanner will measure the sameline width, written via different beams.

Researchers used two types of test patterns to evaluate the relativedose in the different exposure beams. For the test patterns, a measureof the exposure dose is the width of the structures exposed by thedifferent beams. Researchers used skew pattern A and measured linewidth, with only one of the exposure beams on at any given moment. FIG.3A shows a graph of the results for pattern A, of measured line widthcritical dimension (CD) per unit time 324 for exposures across threedifferent patterning runs 312 represented using three different colors.The results for the three different exposure patterns are very similar,with the same range of CD of between +10 and −10 nm. The measurement ofstatic crosstalk resulted in power modulations of less than 1%.

As a second test with pattern B, researchers used a stable andrepeatable transducer input signal and measured line width, with allbeams exposed (turned on) at the same time. From job to job the exposuredose did not change. For a multi-channel acousto-optic modulator, somekind of cross-talk is expected when sending acoustic energy into thecrystal. In this experiment, 15 transducers were mounted, spacedseparated by 0.9 nm, on a single monolithic quartz crystal the size of asugar cube and fed by independent electronics. FIG. 3B shows the resultsfor pattern B. The results changed a lot from job to job, for threedifferent patterning runs, represented in the graph using threedifferent colors. For the inputs described, the critical dimensions (CD)per unit time 384 for the width of structures exposed by the differentbeams covered a range between approximately −20 nm 274 and +30 nm 354.When all 15 transducer beams were exposed at the same time, a fullydeveloped crosstalk situation ensued. The typical relationship betweenCD for line width and dose for this exposure mode is 4 nm per percent,which translates to a spread in exposure dose of up to 12% betweenconsecutive exposures of the pattern. 12% corresponds to 48 nm inline-width variability, which is unacceptable. If interpreted as a truedose, pattern B indicates a dose variability of 10-15%.

The results for the two test pattern types show very different beam dosesignatures. Cross-talk-driven exposure dose variations are not viewablein the static situation in which a single signal is active at any giventime. Cross-talk is dependent on the phases of multi-channel inputsignals. If the phase is random from job to job, then the CD is randomfrom job to job.

Phase-dependent cross talk between acousto-optic modulator (AOM)channels affects the CD: when the phase relationship between neighbortransducer channels changes, the impact on the apparent beam dosechanges. In the research example, the 220 MHz carrier signal introducesa random phase relationship between the different transducer beams foreach job, which is a cause of the variability between jobs. The phaserelationship remained constant during a job but changed between jobs.That is, inter-channel cross-talk between modulators in a multi-channelAOM can have an adverse impact on critical dimensions (CD). When thisproblem was identified and fixed, the beam dose remained constant overjobs, reducing the impact of acoustic cross-talk between the modulatorsin the multi-channel AOM and thereby improving the critical dimensionsfor pattern generation, direct-write lithography and for optical writingof patterns on a photosensitive surface.

Careful study and simulation led to an understanding of coherenceeffects within the AOM crystal that were impacting CD accuracy. Thespread frequency approach transforms static CD differences impactingCD-uniformity, into periodically changing CD along the sweep directionof the pattern writer. Experiments have shown that the nature of thecrosstalk in the AOM is strongly dependent on the relative phase of the220 MHz carrier signal in the different channels. By applying differentfrequencies in different AOM channels the phase relationship isconstantly changing. This in turn modulates the crosstalk signature overtime and smears the impact on exposed structures.

When different carrier frequencies are used on the different AOMchannels the interference pattern will no longer be static. Theinterference pattern will travel through the crystal with a speed givenby the frequency difference between adjacent AOM channels. The amplitudeimprint on the laser beam will change over time and the impact on theexposure result will change as well. If these changes occur quicklyenough, the overall impact on the exposure result will be an improvementcompared to the default configuration with the same frequency on allchannels.

FIG. 4 illustrates a spread carrier frequency approach, with each of 15transducer channels 455 assigned a unique carrier frequency ranging from216.5 to 223.5 MHz, centered around a frequency of 220 MHz 442 and fedby independent electronics. FIG. 4 pattern A 422 shows results for atest in which a single exposure beam for one of the 15 transducerchannels 455 is turned on at any given moment. The graph shows measuredline width, for the scenario in which only one of the exposure beams isturned on at any given moment. The graph shows measured line widthcritical dimensions (CD) per unit time for repeated exposures acrossthree different exposure patterns represented using three differentcolors in the graph. The results for the three different exposures arevery similar. FIG. 4 also shows results for test pattern B 438 in whichall of the exposure beams are turned on at the same time, again usingvery slightly different carrier frequencies for each of the 15transducers, so the pattern types were nearly in agreement on the beamdoses. For the inputs described, the critical dimensions (CD) per unittime for the width of structures exposed by the different beams covereda range of less than 10 nm at any given moment in time. That is, themodulation of the line width corresponds to the frequency differencebetween two adjacent AOM channels, in the spread frequency approach.

Inter channel crosstalk in a multi-channel AOM causes the phaserelationship between neighboring channels to have an impact on the beamdose. The crosstalk may be both electric and/or acoustic crosstalk.During acoustic crosstalk, each beam experiences the effects of aninterference wave pattern generated by acoustic energy spread from atleast the closest transducer channel in the AOM crystal. With a changein phase of the carrier frequency, the standing wave pattern will moveand the impact on the beams will change. With different carrierfrequencies on the channels, the standing wave pattern will move andsmear the effect over time.

FIG. 5 shows the sweep position in micrometers, as a function of theexposed line width in nanometers 522. In FIG. 5, the uppermost line inthe graph corresponds to beam 1, the second line from the topcorresponds to beam 2, and so forth. This illustrates spread carrierfrequency approach results for the measured critical dimension, when thefifteen transducers are turned on at the same time, for the test inwhich 15 transducer beams were each given unique carrier frequencies,ranging from 216.5 to 223.5 MHz. The modulation of the line widthcorresponds to the frequency difference between two adjacent AOMchannels.

AOM bandwidth affects exposure results, which will benefit from fastermoving interference patterns in the AOM crystal achieved by increasingthe difference in carrier frequency between adjacent AOM channels. Thereis a limit to how much the carrier frequency can deviate from thedesigned 220 MHz utilized in the described example. The limitation canbe understood by considering the bandwidth of the AOM and the effects ofimpedance matching of the electronics in the AOM. Offsetting the carrierfrequency very far from the most efficient frequency attenuates theoptical transmission, resulting in lower available writing power. Thisresult may be compensated by increasing the laser power. There ishowever a limit to the feasibility of this approach. Traditionally AOMshave been designed to a narrow bandwidth, according to the classicalrequirements. Note that the design of the AOM may be changed to increasethe bandwidth, enabling a larger spread in carrier frequency.

Simulations led to further understanding of coherence effects, withinthe AOM crystal, that impact CD accuracy. When many transducers aremounted on a single monolithic quartz crystal, the side-lobes ofneighboring transducer signals interact to create a complex interferencepattern of sound waves, even when the transducers are fed by independentelectronics. The neighboring channel crosstalk impacts the beam dose.The simulation shows the effect of side lobes of nearby transducersignals, with coherence effects caused by the phase relationship ofcrosstalk between neighboring channels in the multi-channel AOM.

FIG. 6 shows a simulation of interference from neighboring transducers622, 662 that affects a center transducer 642. The effects of the sidelobes of two neighboring transducer signals become visible in theenhanced contrast image, with side lobe interference 628 caused bytransducer one 622 and side lobe interference 668 caused by transducerthree 662.

FIG. 7 displays a simulation of average energy disturbance that will beimprinted in the energy distribution over the laser beam, from twoneighboring channel signals. The simulation calculates the effect ofsubtracting the energy of an undisturbed single transducer channelsignal 724 from the average acoustic energy in the crystal 722, which iscalculated by integrating over the period of the 220 MHz signal. Thesubtraction yields the average energy disturbance from the two neighborchannels 726. This pattern 746 will be imprinted in the energydistribution over the laser beam. The color scales 762, 765, 768 aredisplayed to the right of each of the color energy maps.

Another simulation of phase relationships on coherence effects withinthe AOM crystal also led to the disclosed approach for addressing thecoherence effects that were discovered. Continuing with phase-basedsimulations, when the phase of one of the neighbor channels is changed,the geometry of the interference pattern changes. FIG. 8 displays asimulation of the average energy disturbance that will be imprinted inthe energy distribution over the laser beam for three different phaserelationships. FIG. 8 shows the average energy disturbance when there isno phase change 822 which results in energy disturbance 872. FIG. 8 alsoshows the effect when there is a phase relationship of ⅔ pi 825,resulting in energy disturbance 875, and when there is a phaserelationship of 4/3 pi 828 resulting in energy disturbance 878. Thissimulation sheds light on the effect on the CD of carrier frequencyphase changes of transducer signals. This simulation explains the effecton the line width of exposed structure changes with carrier frequencyphase.

FIG. 9 illustrates a saw-tooth configuration for channel distributionthat utilizes the concept that crosstalk is limited in space and fadesas distance increases from the transducer in the AOM. This addresses thelimit of how much the carrier frequency may spread through the AOMbefore resulting in a lower optical transmission, as described supra. Alarge carrier frequency offset for the nearest neighbors in the AOMcrystal mitigates the effects of the crosstalk. A distant neighbor may,due to the large distance, be close in frequency. The impact from thisdistant neighbor is weak enough not to be a problem due to its largespatial separation.

FIG. 10 illustrates an example stair configuration of channel frequencydistribution in an AOM. The x axis shows the fifteen different AOMchannels, in the spatial dimension and the y axis shows the AOM carrierfrequency for each of the channels, centered on a 220 Mhz carrierfrequency. In this arrangement with a staircase distribution offrequencies, repeated pairs of channels, separated only by one channelin the spatial dimension, utilize the same carrier frequency, so thesepairs will be the weakest link in the design.

Next, we describe a computer system usable for generating modulated RFsignal 130 for driving the AOM channels.

Computer System

FIG. 11 is a simplified block diagram of a computer system 1100 that canbe used for generating modulated RF signals for driving the AOMchannels, according to one implementation of the technology disclosed.

Computer system 1100 includes at least one central processing unit (CPU)1172 that communicates with a number of peripheral devices via bussubsystem 1155. These peripheral devices can include a storage subsystem1110 including, for example, memory devices and a file storage subsystem1136, user interface input devices 1138, user interface output devices1176, and a network interface subsystem 1174. The input and outputdevices allow user interaction with computer system 1100. Networkinterface subsystem 1174 provides an interface to outside networks,including an interface to corresponding interface devices in othercomputer systems.

User interface output devices 1176 can include a display subsystem ornon-visual displays such as audio output devices. The display subsystemcan include an LED display, a flat-panel device such as a liquid crystaldisplay (LCD), a projection device, a cathode ray tube (CRT), or someother mechanism for creating a visible image. The display subsystem canalso provide a non-visual display such as audio output devices. Ingeneral, use of the term “output device” is intended to include allpossible types of devices and ways to output information from computersystem 1100 to the user or to another machine or computer system.

Memory subsystem 1122 used in the storage subsystem 1110 can include anumber of memories including a main random-access memory (RAM) 1132 forstorage of instructions and data during program execution and a readonly memory (ROM) 1134 in which fixed instructions are stored. A filestorage subsystem 1136 can provide persistent storage for program anddata files, and can include a hard disk drive, a floppy disk drive alongwith associated removable media, a CD-ROM drive, an optical drive, orremovable media cartridges. The modules implementing the functionalityof certain implementations can be stored by file storage subsystem 1136in the storage subsystem 1110, or in other machines accessible by theprocessor.

Bus subsystem 1155 provides a mechanism for letting the variouscomponents and subsystems of computer system 1100 communicate with eachother as intended. Although bus subsystem 1155 is shown schematically asa single bus, alternative implementations of the bus subsystem can usemultiple busses.

Computer system 1100 itself can be of varying types including a personalcomputer, a portable computer, a workstation, a computer terminal, anetwork computer, a television, a mainframe, a server farm, awidely-distributed set of loosely networked computers, or any other dataprocessing system or user device. Due to the ever-changing nature ofcomputers and networks, the description of computer system 1100 depictedin FIG. 11 is intended only as a specific example for purposes ofillustrating the preferred embodiments of the present invention. Manyother configurations of computer system 1100 are possible having more orless components than the computer system depicted in FIG. 11. Thecomputer system can be used to control a microlithography laser writer,such as a laser writer for large area masks or smaller, semi-conductormasks. The microlithography writer can be a multi-beam writer.

The preceding description is presented to enable the making and use ofthe technology disclosed. Various modifications to the disclosedimplementations will be apparent, and the general principles definedherein may be applied to other implementations and applications withoutdeparting from the spirit and scope of the technology disclosed. Thus,the technology disclosed is not intended to be limited to theimplementations shown, but is to be accorded the widest scope consistentwith the principles and features disclosed herein. The scope of thetechnology disclosed is defined by the appended claims.

Some Particular Implementations

Some particular implementations and features are described in thefollowing discussion.

In one implementation, a disclosed method of reducing impact ofcross-talk between transducers that drive an acousto-optic modulator(AOM) includes operating the transducers, which are coupled to anacousto-optic medium, with different frequencies applied to adjoiningtransducers and producing a time varying phase relationship betweencarriers on spatially adjoining modulation channels emanating from theadjoining transducers.

The method described in this section and other sections of thetechnology disclosed can include one or more of the following featuresand/or features described in connection with additional methodsdisclosed. In the interest of conciseness, the combinations of featuresdisclosed in this application are not individually enumerated and arenot repeated with each base set of features. The reader will understandhow features identified in this method can readily be combined with setsof base features identified as implementations.

The disclosed method also includes operating the transducers with thefrequencies having differences between pairs of adjoining transducers ofat least 100 KHz and a maximum difference of 20 MHz. For someimplementations of the disclosed method frequency differences betweenpairs of adjoining transducers is in a range of 400 KHz to 10 MHz.

Some implementations of the disclosed technology include operatingbetween 5 and 32 of the transducers to produce 5 to 32 modulationchannels in the acousto-optic medium.

In one implementation of the disclosed method, the different frequenciesbetween the spatially adjoining modulation channels are arranged in asawtooth pattern.

In another implementation of the disclosed method, the differentfrequencies between the spatially adjoining modulation channels arearranged in a rising or falling pattern applied progressively to theadjoining transducers.

For some implementations of the disclosed method, the differentfrequencies vary between pairs of adjoining transducers by an amount ina range of plus or minus three percent from an average frequency appliedto the transducers.

For one implementation of the disclosed technology, an acousto-opticmodulator (AOM) with reduced impact of cross-talk between transducersthat are part of the AOM, includes an acousto-optic medium, a pluralityof transducers physically coupled to the acousto-optic medium, spacedapart to drive separate modulation channels within the acousto-opticmedium, and a signal synthesizer coupled to the transducers that drivesthe transducers at different frequencies to produce a time varying phaserelationship between spatially adjoining modulation channels.

The disclosed AOM can include operating the transducers with thefrequencies having differences between pairs of adjoining transducers ofat least 100 KHz and a maximum difference of 20 MHz in one case. Inanother implementation, the disclosed AOM includes frequency differencesbetween pairs of adjoining transducers in a range of 400 KHz to 10 MHz.

One implementation of the disclosed AOM includes operating between 5 and32 of the transducers to produce 5 to 32 modulation channels in theacousto-optic medium. For some implementations, the differentfrequencies between the spatially adjoining modulation channels arearranged in a sawtooth pattern. In other implementations of thedisclosed AOM, the different frequencies between the spatially adjoiningmodulation channels are arranged in a rising or falling pattern appliedprogressively to the adjoining transducers. In some implementations ofthe disclosed AOM, the different frequencies vary between pairs ofadjoining transducers in an amount in a range of plus or minus fivepercent from an average frequency applied to the transducers.

The technology disclosed can be practiced as a system, method, orarticle of manufacture. One or more features of an implementation can becombined with the base implementation. Implementations that are notmutually exclusive are taught to be combinable. One or more features ofan implementation can be combined with other implementations.

While the technology disclosed is disclosed by reference to thepreferred embodiments and examples detailed above, it is to beunderstood that these examples are intended in an illustrative ratherthan in a limiting sense. It is contemplated that modifications andcombinations will readily occur to those skilled in the art, whichmodifications and combinations will be within the spirit of theinnovation and the scope of the following claims.

We claim as follows:
 1. A method of reducing impact of cross-talkbetween transducers that drive a multibeam acousto-optic modulator,abbreviated AOM, including: operating the transducers, which are coupledto an acousto-optic medium for driving separate modulation channelswithin the acousto-optic medium, with different single-frequency signalsapplied to adjoining transducers and thereby producing a time varyingphase relationship between carriers on spatially adjoining modulationchannels emanating from the adjoining transducers.
 2. The method ofclaim 1, further including operating the transducers with thesingle-frequency signals having differences between pairs of adjoiningtransducers of at least 100 KHz and a maximum difference of 20 MHz. 3.The method of claim 2, wherein frequency differences between pairs ofadjoining transducers is in a range of 400 KHz to 10 MHz.
 4. The methodof claim 1, further including operating between 5 and 32 of thetransducers to produce 5 to 32 modulation channels in the acousto-opticmedium.
 5. The method of claim 1, wherein the different frequenciesbetween the spatially adjoining modulation channels are arranged in asawtooth pattern.
 6. The method of claim 1, wherein the differentfrequencies between the spatially adjoining modulation channels arearranged in a rising or falling pattern applied progressively to theadjoining transducers.
 7. The method of claim 1, wherein the differentfrequencies vary between pairs of adjoining transducers by an amount ina range of plus or minus three percent from an average frequency appliedto the transducers.
 8. A multibeam acousto-optic modulator, abbreviatedAOM, with reduced impact of cross-talk between transducers that are partof the AOM, including: an acousto-optic medium; a plurality oftransducers physically coupled to the acousto-optic medium, spaced apartto drive separate modulation channels within the acousto-optic medium;and a signal synthesizer coupled to the transducers that drives thetransducers at different single-frequency signals to produce a timevarying phase relationship between spatially adjoining modulationchannels.
 9. The multibeam AOM of claim 8, further including operatingthe transducers with the single-frequency signals having differencesbetween pairs of adjoining transducers of at least 100 KHz and a maximumdifference of 20 MHz.
 10. The multibeam AOM of claim 9, whereinfrequency differences between pairs of adjoining transducers are in arange of 400 KHz to 10 MHz.
 11. The multibeam AOM of claim 8, furtherincluding operating between 5 and 32 of the transducers to produce 5 to32 modulation channels in the acousto-optic medium.
 12. The multibeamAOM of claim 8, wherein the different frequencies between the spatiallyadjoining modulation channels are arranged in a sawtooth pattern. 13.The multibeam AOM of claim 8, wherein the different frequencies betweenthe spatially adjoining modulation channels are arranged in a rising orfalling pattern applied progressively to the adjoining transducers. 14.The multibeam AOM of claim 8, wherein the different frequencies varybetween pairs of adjoining transducers in an amount in a range of plusor minus five percent from an average frequency applied to thetransducers.
 15. A microlithographic laser writer comprising an AOM ofclaim
 8. 16. A microlithographic laser writer configured to perform themethod of claim 1.